SmartFactory AI™ Run-to-Run Advanced Recipe Tuning

Improve process control for complex and low-volume products

Read Quality blog

How do you improve yield and reduce variability when traditional R2R controllers struggle with nonlinear process behavior?

SmartFactory AI Run-to-Run Advanced Recipe Tuning (ART) uses AI/ML to enhance existing R2R control systems, improving recipe adjustments for high-mix and low-volume semiconductor manufacturing while enabling tighter process control, faster optimization, and measurable yield gains without disrupting current infrastructure.
Circle Professional Woman

Why choose SmartFactory AI Run-to-Run Advanced Recipe Tuning?

SmartFactory AI Run-to-Run Advanced Recipe Tuning helps teams improve process capability, deploy in months rather than years, and extend existing R2R investments without adding complexity.

10% improvement in Cpk

5-month deployment

Seamless integration with existing infrastructure

What can you gain from our approach?

Improved process stability

  • Augments traditional R2R control systems with AI-enhanced recipe tuning recommendations
  • Delivers advanced control for nonlinear processes
  • Creates more consistent process performance across products and operating conditions

Improved yield and product quality

  • Machine learning models improve recipe parameter adjustment accuracy
  • Delivers more effective control for high-mix, low-volume manufacturing environments
  • Creates measurable process capability improvements

Faster deployment of AI for process control

  • Provides a platform for rapid model training, deployment, and lifecycle management
  • Delivers a web-based user experience that simplifies model implementation and adoption
  • Creates visibility into model performance through integrated monitoring, reporting, and analytics