SmartFactory Process Quality Solutions

Implement a zero-defect strategy to ensure superior process quality and consistency.

Run-to-Run Control

Improves yield by optimizing equipment and process performance

SPC®

Combines the power of data transformation with analytics to deliver intelligent detection

Fault Detection

Minimizes yield loss and reduces unscheduled equipment downtime

Recipe Management System

Provides manufacturing consistency through automated recipe management

Equipment Automation

Increases productivity and reduces human error. Enables automation possibilities beyond manual basics

Process quality for improved yield and reduced variability across the fab

Engineering consistent yield and process control across semiconductor manufacturing

Run-to-Run Control

Improves yield by optimizing equipment and process performance.

SPC

Combines the power of data transformation with analytics to deliver intelligent detection.

Fault Detection

Minimizes yield loss and reduces unscheduled equipment downtime.

Recipe Management System

Provides manufacturing consistency through automated recipe management.

Equipment Automation

Increases productivity and reduces human error. Enables automation possibilities beyond manual basics.

Asset Trace

Improves asset utilization with asset trace throughout entire life cycle.

Maintenance Management

Improves power of equipment maintenance – scheduled and unscheduled activities.

Defect Classification

Improves classification accuracy, reduces cycle time, and enables consistent, scalable defect decisions.

Defect Source

Accelerates root cause analysis by automatically identifying defect source layers and reducing manual troubleshooting effort for out-of-control events.

Knowledge Advisor

Transforms how engineers investigate and resolve process issues by unifying factory data with AI-driven, reusable knowledge—enabling faster, more consistent decisions at scale.

Advanced Recipe Tuning

Enhances existing R2R control systems with AI-driven recipe tuning, improving process capability and yield for high-mix, low-volume manufacturing without disrupting current infrastructure.

Predictive Metrology

Predicts metrology values in real time using machine learning, reducing dependence on physical measurements and enabling earlier detection of process drift.