Increase productivity and reduce human error — execute equipment automation services at run time
Applied SmartFactory Equipment Automation is an equipment design and control framework that executes automation services at run time. It integrates equipment data — the largest source of data in manufacturing — to enable automation flow design, transaction and sequence testing, run-time troubleshooting and diagnostics, and centralized user maintenance, which increases productivity while reducing errors and scrap losses. For fab operations, this framework is what makes material movement without operator intervention possible. It coordinates the load, process, and unload sequence that an operator would otherwise perform and verify by hand.
Applied SmartFactory Equipment Automation increases output by keeping equipment assets utilized through run-time automation scenarios and automated dispatching, which delivers 10–15% more wafer output per day and 10% higher tool utilization. Data recording time falls by 97% because collection records are compiled and distributed automatically rather than entered manually. Quality control pre-checks confirm that material matches the correct sequences and recipes before processing begins.
It is an equipment design and control framework that executes automation services at run time, covering automation flow design, transaction and sequence testing, run-time troubleshooting and diagnostics, and centralized user maintenance.
Quality control pre-checks validate that the correct material matches the appropriate sequences and recipes before processing starts, which catches mismatches at the point where they are still cheap to fix. It also consistently meets quality and engineering data requirements without relying on manual entry.
It keeps equipment assets utilized by executing run-time automation scenarios, and with automated dispatching fabs report 10% increased tool utilization and 10–15% more wafer output per day.
Yes. Coordinated with SmartFactory FullAuto, it transports, loads, processes, and unloads material without operator intervention.
It compiles and distributes data collection records to the appropriate applications for analysis, and analyzes equipment performance to identify hidden cycle time losses. Automating that record-keeping is what produces the 97% reduction in data recording time.
Yes. It integrates with Applied's SmartFactory CIM solution and with other non-Applied solutions, so it does not require replacing the surrounding factory systems.
Equipment Automation executes automation services at run time, validating material before it processes and turning equipment data into analysis instead of paperwork.
