Optimize your maintenance schedules — manage planned, scheduled, and unscheduled work in one equipment-centric system
Applied SmartFactory Maintenance Management is an equipment-centric computerized maintenance management system (CMMS) that manages planned, scheduled, and unscheduled maintenance activities. Developed specifically for the semiconductor industry, it optimizes overall inventory levels, improves equipment availability, and decreases labor and parts costs. For maintenance organizations, being equipment-centric is the distinction that matters. The system tracks states and activities down to an individual chamber in a cluster tool, so availability reflects what the tool can actually run rather than a single up-or-down flag.
Applied SmartFactory Maintenance Management improves availability by automating maintenance activities and scheduling tools and technicians against real equipment states, which reduces loss from downtime, setup, and adjustments. Tracking states down to the chamber lets planners assess availability accurately even when a tool is downgraded but still operational. Access to an in-depth semiconductor equipment hierarchy, configurability, and state modeling is what makes that level of detail practical.
A computerized maintenance management system manages planned, scheduled, and unscheduled maintenance activities. Applied SmartFactory Maintenance Management is equipment-centric and was developed specifically for the semiconductor industry, so its equipment hierarchy and state modeling reflect how fab tools actually behave.
Unscheduled activities are managed alongside planned and scheduled work in the same system, so an unexpected intervention is scheduled against real tool state and technician availability rather than disrupting a plan kept somewhere else.
Yes. It tracks equipment states and activities down to an individual chamber in cluster tools, which is also what allows tool availability to be assessed accurately in downgraded yet operational states.
Technicians work from “at-the-tool” checklists using a mobile client, which is how the system enforces BKMs and first-time-right execution instead of relying on paper schedules and spreadsheets.
It integrates with any MES, and specifically with FACTORYworks®, which works on the same model. It also integrates with Applied E3® and APF RTD® solutions to support WIP reallocation when necessary.
It optimizes overall inventory levels so parts are stocked to actual maintenance demand, and it automates scheduling of tools and technicians so labor is planned rather than reactive. Eliminating spreadsheets and paper schedules removes the administrative overhead around both.
Maintenance Management schedules planned, scheduled, and unscheduled work against live tool state, down to the individual chamber.
