Minimize yield loss due to excursions — catch equipment issues before they reach process output
Applied SmartFactory Fault Detection is a process control solution that detects equipment issues by monitoring sensors and events against defined performance metrics, improving tool availability and reducing scrap. Unlike standalone systems that rely on reactive methods, it provides proactive and rapid feedback on equipment issues before they affect process output. For engineering teams, that difference decides whether an excursion stays a contained event or becomes a lot-level loss. Fault Detection watches the tool’s own signals continuously, so a developing problem is visible while there is still time to intervene.
Applied SmartFactory Fault Detection reduces scrap and downtime by detecting problems at the source and filtering out the noise that hides them. Fabs report more than 95% reduction in scrapped material, a 90% reduction in equipment and process false alarms, and 25 or more hours less unscheduled equipment downtime. Fewer false alarms means engineering attention goes to real equipment issues rather than to signals that were never faults.
Fault Detection monitors equipment sensors and events against defined performance metrics, which lets it detect problems at the source rather than inferring them from downstream results. It also detects previously undetectable issues and monitors the fab through analytics and reporting.
Fault Detection offers extensive data filtering to eliminate false positives, which is what produces the reported 90% reduction in equipment and process false alarms. The practical effect is that engineers stop spending investigation time on signals that were never real faults.
Fault Detection predicts and proactively schedules systems for repair before failures can occur, and it increases the predictability of operations and tool downtime. Maintenance moves from reacting to a failure toward scheduling around a known condition.
Fabs report greater than 95% reduction in scrapped material. The reduction comes from detecting equipment issues before they affect process output, so material is not processed through a tool that has already started to drift.
Its data filtering is built to easily handle maintenance events, so planned activity on a tool does not generate the false positives that would otherwise follow every intervention. That keeps the alarm stream trustworthy through normal maintenance cycles.
Fault Detection offers a common platform with integration to Run-to-Run, SPC, and Recipe Management to promote information sharing. It also facilitates integration of process tool, metrology tool, and manufacturing data between APC components.
Fault Detection gives engineering teams early, filtered signals on equipment behavior so problems are addressed before they reach process output.
