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SmartFactory Durables Management
Improve asset utilization
How do you manage critical production assets in your factory?
A durable is essentially a mobile extension of a tool—a reticle, carrier, probe card, pump, or valve. These assets play an important role in ensuring that production tools keep running at peak efficiency. SmartFactory Durables Management is an automated durable management system that properly manages the state and location of durables throughout their life cycle, which is essential for achieving optimal product quality, cycle times, and tool utilization rates.

Why choose SmartFactory Durables Management?
50% reduction of reticles “not found at track-in” at steppers
3% improvement in equipment utilization
Increased productivity due to less information lookup
What can you gain from our approach?
Easier modeling
- Associate specific durables within a family to a preferred piece of equipment, enabling several durables to be used interchangeably
- Define state models to track and manage the life cycle of any durable
- Easily configure models without any programming
Easier integration
- Easily integrate with other factory systems, such as MES, MCS, APC, and dispatching
- Use together with SmartFactory RTD for real‐time decision‐making control and WIP management, reducing litho‐cell idle time for misplaced reticles and probe cards
Greater profitability
- Reduce scrap through pre-scheduled, event-based durables maintenance
- Increase productivity yield and throughout to meet “delivery-to-promise” commitments
- Eliminate unreliable manual updates and reduce staging resources, allowing operators to focus on other areas