How do you manage thousands of recipes spread across your facility?
Manufacturing equipment recipes are a company’s top intellectual property. To manage these recipes, our SmartFactory Recipe Management System (RMS) provides an easy way to review recipe differences, duplicates, and consolidations, while protecting recipe IP through a secure centralized repository. The solution validates runtime recipes and parameters, improving line yield and traceability.

Why choose SmartFactory Recipe Management?
50% estimated scrap reduction due to human error
4–10% estimated line yield improvement in mature fabs
What can you gain from our approach?
Central recipe repository
- Maintains recipes in secure repository with redundancy and version control
- Protects business continuity by preventing accidental loss of tool recipes
- Provides historical recipe traceability for certification and audit readiness
Automated recipe efficiency
- Controls equipment constants and recipe parameter values, reducing misprocessing
- Automates run-time validation in conjunction with equipment automation, increasing wafer output
Reduced human errors
- Validates runtime recipes against recipe specifications, minimizing rework and scrap
- Reduces errors from updating incorrect steps or modifying wrong parameters