SmartFactory Run-to-Run Control

Optimize tool recipe parameters

How do you solve process capability issues in your facility?

SmartFactory Run-to-Run Control is an advanced process control (APC) solution that improves process capability (Cpk) and optimizes tool recipe parameters. The out-of-box solution offers patented model prediction that includes a multivariant, constrained, optimization-based process controller with proven deployment success.
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Why choose SmartFactory Run-to-Run Control?

30% average Cpk improvement

10–30% reduction in scrap events

2–4% increase in mature yield

What can you gain from our approach?

Improved yield

Improved quality

Lower cost of ownership