SmartFactory Fault Detection
Minimize yield loss due to excursions
How do you reduce excursions in your facility?
SmartFactory Fault Detection is a process control solution that quickly detects equipment issues by monitoring sensors and events against performance metrics, resulting in improved tool availability and reduced scrap. Unlike many standalone systems, which rely on reactive methods, SmartFactory Fault Detection offers proactive and rapid feedback on equipment issues before they affect process output.
Why choose SmartFactory Fault Detection?
90% reduction in equipment & process false alarms
>95% reduction in scrapped material
25+ hour reduction in unscheduled equipment downtime
What can you gain from our approach?
Improved fab KPIs
- Safeguards your fab by detecting problems at the source
- Detects previously undetectable issues
- Monitors your fab through analytics and reporting
Actionable information
- Predicts and proactively schedules systems for repair before failures can occur
- Increases predictability of operations and tool downtime
- Offers extensive data filtering to eliminate false positives and easily handle maintenance events
Integrated platform
- Offers common platform with integration to Run-to-Run, SPC, and Recipe Management to promote information sharing
- Facilitates integration of process tool, metrology tool, and manufacturing data between APC components
