SmartFactory Maintenance Management
In your fab, is maintenance planning automated?
SmartFactory Maintenance Management is an equipment‐centric computerized maintenance management system (CMMS) that effectively manages planned, scheduled, and unscheduled maintenance activities. Developed specifically for the semiconductor industry, the solution optimizes the management of overall inventory levels, improves equipment availability, and decreases labor and parts costs.
Why choose SmartFactory Maintenance Management?
Access to in-depth semi equipment hierarchy, configurability, and state modeling
Increased factory equipment availability and efficiency
Reduction in labor and parts costs
What can you gain from our approach?
Better planning
- Automate maintenance activities and easily schedule your tools and technicians
- Eliminate need for spreadsheets and paper schedules
- Implement “at-the-tool” checklists using mobile client to ensure BKMs and first time rights
Better productivity
- Track equipment states and activities down to individual chamber in cluster tools
- Accurately assess tool availability even in downgraded yet operational states
- Improve asset availability by reducing loss due to downtime, setup, and adjustments
Better integration
- Integrate with any MES, and specifically with FACTORYworks®, which works on the same model
- Integrate with Applied E3® and APF RTD® solutions to support WIP reallocation when necessary
- Integrate with key factory systems, including spare parts inventory and technician tracking and scheduling
