SmartFactory Run-to-Run Control
Optimize tool recipe parameters
How do you solve process capability issues in your facility?
SmartFactory Run-to-Run Control is an advanced process control (APC) solution that improves process capability (Cpk) and optimizes tool recipe parameters. The out-of-box solution offers patented model prediction that includes a multivariant, constrained, optimization-based process controller with proven deployment success.
Why choose SmartFactory Run-to-Run Control?
30% average Cpk improvement
10–30% reduction in scrap events
2–4% increase in mature yield
What can you gain from our approach?
Improved yield
- Reduces process variation
- Enables better decision-making during development and ramp phases of production
- Reduces yield killing process variation during high volume manufacturing
Improved quality
- Improves Cpk by automatically optimizing tool recipe parameters
- Reduces out of spec (OOS) and scrap events by compensating for drifts from equipment and processes
- Improves throughput by reducing pilot wafers
Lower cost of ownership
- Reduces model management activities through a unified modeling structure
- Offers common platform with integration to SPC and FDC to promote information sharing
